ULVAC Inc has announced its ongoing participation in the Lab-in-Fab project, a collaborative initiative aimed at advancing piezoelectric MicroElectroMechanical Systems (piezoMEMS) technology. This project, based at STMicroelectronics’ Ang Mo Kio campus in Singapore, has entered a new phase, with ULVAC contributing its expertise in deposition and etching technologies to aid in the commercialisation of piezoMEMS.
The Lab-in-Fab project is part of Singapore’s public-private semiconductor research and development ecosystem. It brings together universities, startups, small and medium-sized enterprises, and multinational corporations to foster technology commercialisation and talent development. Since its inception in 2020, ULVAC has worked alongside STMicroelectronics and the A*STAR Institute of Microelectronics to develop advanced lead zirconate titanate (PZT) thin film devices, significantly reducing lead content to lower environmental impact.
In the project’s new phase, ULVAC will continue its collaboration with STMicroelectronics and embark on new projects with A*STAR’s Institute of Materials Research and Engineering and the National University of Singapore. The focus will be on developing environmentally friendly lead-free materials and enabling compact, cost-effective sensors and actuators.
Harunori Iwai, Executive Officer and General Manager of the Advanced Electronics Equipment Division at ULVAC, stated, “We are proud to continue participating in this groundbreaking project and to contribute our expertise in manufacturing technology solutions for the piezoMEMS industry.”
ULVAC’s ongoing efforts in the Lab-in-Fab project are expected to drive next-generation manufacturing through innovation in equipment technology and global collaboration, supporting the miniaturisation and performance enhancement of wearable devices, medical monitors, and communication equipment.
“`